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| #3820317 in Books | 2010-09-07 | Original language:English | PDF # 1 | 9.50 x.70 x6.30l,1.14 | File type: PDF | 226 pages|||"Computational lithography draws from the rich theory of inverse problems, optics, optimization, and computational imaging; as such, the book is also directed to researchers and practitioners in these fields. " (Consumer Electronics Net, 15 March 2011)|
A Unified Summary of the Models and Optimization Methods Used in Computational Lithography
Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since their implementation does not require significant changes in fabrication infrastructure. Computational Lithography is the first book to address the computation...
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