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CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications

Anthony C. Jones, Paul O'Brien




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 | #10344624 in Books |  1997-05-01 | Original language:English |  9.90 x.83 x6.91l,.0 | File type: PDF | 360 pages

||From the Publisher|Chemical growth methods for electronic materials are the keystone of the microelectronics industry. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. The work presents t

Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chemistry for the vapor phase deposition of compound semiconductors. Vapor phase methods used for semiconductor deposition and the materials properties that make the organometallic precursors useful in the electronics industry are discussed for a variety of materials.

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