| #4084151 in Books | 2008-12-15 | Original language:English | PDF # 1 | 10.00 x1.70 x7.00l,.0 | File type: PDF | 700 pages|||Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future speci
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
You can specify the type of files you want, for your gadget.EUV Lithography | Vivek Bakshi. A good, fresh read, highly recommended.
