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Handbook of Silicon Semiconductor Metrology

From Brand: CRC Press




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 | #2961903 in Books |  CRC Press |  2001-06-29 | Original language:English | PDF # 1 |  10.00 x7.25 x1.50l,3.73 | File type: PDF | 896 pages

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||0 of 0 people found the following review helpful.| The best book on semiconductor metrology.|By Leo|This book is the best that you will find on Semiconductor Metrology. Every chapter is written by the leading expert in the field. This is a much better approach than most textbooks, where one individual attempts to write the whole book themselves. It is a must have reference for anyone going to school or working in the semiconduc| |…recommended for special libraries and academic libraries serving graduate level programs in these areas.|- E-Streams

…a cornerstone reference source….uniquely ample and thorough. |-Semiconductor International

&hellip

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,
this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatn...

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