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Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)

Harry J. Levinson




[PDF.ls77] Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)

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 | #1815066 in Books |  1999-02-12 | Original language:English | PDF # 1 |  10.25 x7.25 x.50l,.99 | File type: PDF | 190 pages

||0 of 0 people found the following review helpful.| Outstanding|By TJ|Indispensable reference for process engineers. Very good coverage of the basics. I would also suggest you these references:

i. Microlithography: Science and Technology by Bruce W. Smith
ii. Principles of Lithography by Harry J. Levinson

They are complementary. Enjoy!|6 of 7 people found the following review helpful.|

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