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Low Temperature Epitaxial Growth of Semi

From Brand: World Scientific Pub Co Inc




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 | #7551501 in Books |  World Scientific Pub Co Inc |  1990-12-01 | Original language:English | PDF # 1 |  .0 x.0 x.0l,.0 | File type: PDF | 352 pages

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Low temperature processes for semiconductors have been recently under intensive development to fabricate controlled device structures with minute dimensions in order to achieve the highest device performance and new device functions as well as high integration density. Comprising reviews by experts long involved in the respective pioneering work, this volume makes a useful contribution toward maturing the process of low temperature epitaxy as a whole.



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