[PDF.47se] Metal Impurities in Silicon-Device Fabrication (Springer Series in Materials Science)

Metal Impurities in Silicon-Device Fabrication (Springer Series in Materials Science)

[PDF.na80] Metal Impurities in Silicon-Device Fabrication (Springer Series in Materials Science)

Metal Impurities in Silicon-Device  Klaus Graff epub
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 | #5701106 in Books |  2012-10-21 | Original language:English | PDF # 1 |  9.21 x.62 x6.14l,.91 | File type: PDF | 270 pages

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||3 of 3 people found the following review helpful.| desktop reference on transition metals in silicon|By +++|The book of K.Graff, published in 1995, has become a desktop reference on transition metals in silicon for students, scientists and engineers. On about 215 pages the author covers properties of the main metal impurities in silicon, such as Fe, Ni, Cu, Mo, Pd, Pt, Au, Sc, Ti, V, Cr, Mn, Co, Zn, Rh, Ag, and Ta, as well as|From the Back Cover|Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during the fabrication of silicon samples and devices. The different mechanisms responsible for contamination are discussed, and a survey i

This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new ed...

You can specify the type of files you want, for your device.Metal Impurities in Silicon-Device Fabrication (Springer Series in Materials Science)   |  Klaus Graff. A good, fresh read, highly recommended.

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