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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering)

Saburo Nonogaki, Ueno Takumi, Toshio Ito




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 | #5882355 in Books |  CRC Press |  1998-06-25 | Original language:English | PDF # 1 |  9.50 x6.50 x.75l,1.33 | File type: PDF | 336 pages

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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."



You can specify the type of files you want, for your device.Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering)   |  Saburo Nonogaki, Ueno Takumi, Toshio Ito.Not only was the story interesting, engaging and relatable, it also teaches lessons.

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