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Semiconductor Industry: Wafer Fab Exhaust Management

J. Michael Sherer




[PDF.je66] Semiconductor Industry: Wafer Fab Exhaust Management

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 | #3410033 in Books |  2005-06-23 | Original language:English | PDF # 1 |  9.62 x.66 x6.12l,.99 | File type: PDF | 216 pages

||0 of 0 people found the following review helpful.| disappointing|By D. Dobkin|This is a 200+ page technical book with not one single diagram or equation. The author does obviously have a lot of experience in treating the stuff that comes out of semiconductor fab equipment, but should have found someone to help write a better book. I was able to follow some of it because I've been in the industry for several decades, but it wo

Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application.

Using examples that provide a clear understanding of the concept...

You can specify the type of files you want, for your device.Semiconductor Industry: Wafer Fab Exhaust Management   |  J. Michael Sherer. I have read it a couple of times and even shared with my family members. Really good. Couldnt put it down.

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