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Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)

Wayne M. Moreau




[PDF.kk10] Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)

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 | #4875162 in Books |  2012-02-22 | Original language:English | PDF # 1 |  9.61 x1.88 x6.69l,3.27 | File type: PDF | 952 pages

||5 of 7 people found the following review helpful.| Lithography|By A Customer|This is the most comprehensive book about semiconductor lithography available today. It holds information on every aspect of optical lithography for people new in this field. And it is a valuable handbook and source for processing resist for those already familiar with SC lithography.

Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography. Lithography, as adopted by the semiconductor industry, is the process of drawing or printing the pattern of an integrated cir...

You easily download any file type for your device.Semiconductor Lithography: Principles, Practices, and Materials (Microdevices)   |  Wayne M. Moreau. I really enjoyed this book and have already told so many people about it!

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