SiO2 in Si Microdevices Manabu Itsumi epub SiO2 in Si Microdevices Manabu Itsumi pdf download SiO2 in Si Microdevices Manabu Itsumi pdf file SiO2 in Si Microdevices Manabu Itsumi audiobook SiO2 in Si Microdevices Manabu Itsumi book review SiO2 in Si Microdevices Manabu Itsumi summary
| #3580165 in Books | Springer | 2003-01-17 | Original language:English | PDF # 1 | 9.21 x.81 x6.14l,1.51 | File type: PDF | 334 pages | ||From the Back Cover|Electronic systems and digital computers are an indispensable element of modern multimedia technologies and the Internet society. But their explosive advance would not have been possible without the extraordinary progress in VLSI technology u
Electronic systems and digital computers are indispensable elements of modern multimedia technologies and the Internet society. But their explosive advance would not have been possible without the extraordinary progress in VLSI technology using high-quality SiO2. This volume addresses the thin gate oxides involved in the individual processes in fabrication, e.g. the growth, cleaning and thermal oxidation of silicon, metal interconnect formation, and photolithography. It ...
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