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Stress-Induced Phenomena in Metallization (American Vacuum Society Series, No. 13, AIP Conference Proceedings, No. 263)

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[PDF.hh58] Stress-Induced Phenomena in Metallization (American Vacuum Society Series, No. 13, AIP Conference Proceedings, No. 263)

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 | #15496530 in Books |  American Institute of Physics |  1998-03-27 | Original language:English | PDF # 1 |  9.48 x.80 x6.50l,1.32 | File type: PDF | 288 pages

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From a September 1991 international workshop in Ithaca, New York, 18 papers address the growing concern over the impact of stress-induced voiding and related phenomena on reliability in very large scale integrated circuits, as the circuit features become ever smaller and challenge the capabilities o



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