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Stress-Induced Phenomena in Metallization: Seventh International Workshop on Stress-Induced Phenomena in Metallization (AIP Conference Proceedings / ... Stress-Induced Phenomena Metallizat.)

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 | #18754678 in Books |  American Institute of Physics |  2004-12-14 | Original language:English | PDF # 1 |  9.21 x.69 x6.14l,1.20 | File type: PDF | 260 pages

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||About the Author|fm.author_biographical_note4

These proceedings contain new research results and advances in basic understanding of stress-induced phenomena in metallization. Papers cover results on electromigration, thermal stresses and void formation in copper-low k interconnect structures.



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