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| #3388100 in Books | 1988-02-01 | Original language:English | PDF # 1 | 10.50 x1.75 x8.50l, | File type: PDF | 676 pages||16 of 16 people found the following review helpful.| Not a book but a collection of review articles|By A Customer|The problem with the book is that it is not a book at all: it is a collection of 12 articles which vary enormously in their style and level. Some are excellent, like Richard Fair's RTP chapter, but many are run-of-the-mill reviews. A welcomed addition is that wafer cleaning and clean room technology have chapters
This is a superb state-of-the-art collection of contributed readings by nationally recognized authorities in VLSI technology. The emphasis of this text is on fabrication.
You easily download any file type for your gadget.VLSI Technology | Simon Sze. A good, fresh read, highly recommended.
